> Business Field > Rubber For Semiconductor Production
Semiconductor
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Semiconductor
Overview
- Rubber materials used in semiconductor production lines and equipment must have be highly resistant to plasma, and thus, they are imported from overseas.
- INEM has developed its own rubber material used in semiconductor equipment which displays strong properties of being highly resistant to plasma that is most widely exposed in the production environment of semiconductors.
Product feature
- The products must be highly resistant to plasma, and display the physical properties of rubber.
Product application
- Semiconductor production facilities / production equipment
Product type
- Gasket, o-ring, various sealing/packing materials, elastic parts, etc.